Micro Electro Mechanical Systems (MEMS) is an interdisciplinary field related to technologies used to fabricate nano to microscale devices and system-on-a-chip. The MEMS devices and systems embed electrical, mechanical, chemical, and hybrid mechanisms to realize devices and systems for a broad array of applications such as physical sensors, biomedical systems, and complex multi-functional nano-micro systems. MEMS combine expertise from many disciplines, including but not limited to all fields of engineering, biology, chemistry, informatics, medicine, and physics.Typical MEMS devices combine sensing, processing and/or actuating functions.They typically combine two or more electrical, mechanical, biological, magnetic, optical orchemical properties on a single microchip.

Program of Study