Graduate Embedded Certificate in Micro Electro Mechanical Systems

Micro Electro Mechanical Systems (MEMS) is an interdisciplinary field related to technologies used to fabricate nano to microscale devices and system-on-a-chip. The MEMS devices and systems embed electrical, mechanical, chemical, and hybrid mechanisms to realize devices and systems for a broad array of applications such as physical sensors, biomedical systems, and complex multi-functional nano-micro systems. MEMS combine expertise from many disciplines, including but not limited to all fields of engineering, biology, chemistry, informatics, medicine, and physics.Typical MEMS devices combine sensing, processing and/or actuating functions.They typically combine two or more electrical, mechanical, biological, magnetic, optical orchemical properties on a single microchip.

The objective of the program is to provide a means for students interested in this interdisciplinary field a mechanism to obtain a concentration in MEMS and to gain acknowledgement for this achievement.

Program of Study

CHBE/ECE/ME 6229Introduction to MEMS3
CHBE/ECE/ME 6460Microelectromechanical Devices3
Select two (2): 6
Microfluidics & Appl
Interface IC Design for MEMS and Sensors
Introduction to Microelectronics Technology
Biomedical Applications of Microelectromechanical Systems
Finite-Element Method: Theory and Practice
Acoustic Transducers and Signal Analysis
Integrated Low-cost Microelectronics Systems Packaging
Special Topics in Thermal Sciences (Thin Film Properties)
Total Credit Hours12